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Metal Lift-off tool
Metal Lift-off tool
Functional application
·Wafer dipping and agitation + ultrasonic，，，，，，，， High Temperature HPC nozzle，，，，，，，，IPA cleaning，，，，，，，，DICO2 rinse，，，，，，，，drying processes，，，，，，，，SMIF available.
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